ZTS-5050
A high-speed, precision surface profiling inspection sensor for shop-floor installation.
Non-contact 3D Surface Profiling Sensor
With a scanning range of 100µm, the ZeroTouch® ZTS-5000 Series non-contact surface profiling sensor system is optimized for nano structures and functional micro structures.
Fast, Precise 3D Surface Measurements
The ZeroTouch® 5000 Series sensor evaluates several thousand surface profiles using advanced white-light interferometry technology to capture high-speed, precision data acquisition and real-time 3D surface roughness measurements. Using high-resolution cameras, the sensor provides highly significant results without the limits of tactile measuring systems.
Surface Measurements
High-resolution cameras measure both smooth and rough specimen surfaces without contact, characterizing mechanically processed surfaces such as mirrors, semiconductor wafers, micro-lenses, glass, metal, plastic, composite, or other surfaces.
Precision Height Mapping
The sensor works with interference objectives from 2.5x to 50x, yielding fast, precise representation of the height information and the relevant surface parameters using a piezo objective adjuster and broadband wavelength spectrum lighting.
ISO Conform Roughness Measurements
Objectives starting from 10x and higher can be used for ISO confirm roughness measurements in accordance with ISO 25178 and ISO 4287.
Aerospace
- Bearings
- Cylinders, pipes, and bores
- Gears and sprockets
- Shafts and seals
- Inline measurements
- Actuators
Automotive
- Bearings
- Brakes and clutches
- Sensors
- Engines
- Gears and sprockets
- Shafts and seals
Semiconductors
- Wafer inspection and metrology
- Electro polished surfaces
- Die attach
- Inkjet nozzle plate
- High purity valves
Medical Devices
- Dental implants
- Medical blades and sharps
- Stents
- Orthopedics
Precision Manufacturing
- Precision machined parts
- Power cutting tools
- Lenses
Consumer Electronics
- LEDs
- MEMs
Features & Benefits
- Non-contact measurements of smooth, rough, and specular surfaces such as glass, metal, plastic, and composites
- Precise measurement of height and relevant surface parameters
- Installed in the immediate vicinity of the production line
- Inspects mirrors, semiconductor wafers, microlenses, and solar cells
- Micron-level, fast measurements of various surface profiles
- 3D sensor with manually interchangeable objective
- White-light interferometry-based, high-resolution 5 MP sensor
- Piezo positioning system with interferometric calibrated closed-loop controller (up to 100µm scan range)
- Optional XY positioning table with manual Z adjustment
- Advanced algorithms improve speed and reduce system noise
Oberflächenmessungen
Hochauflösende Kamera |
5 MP (ZTS-5050) | |||
| Messpunkte | 2,456 x 2,054 | |||
| Scanning Speed, Full ResolutionScangeschwindigkeit, volle Auflösung | 77 Hz | |||
| Scangeschwindigkeit ROI | Bis zu 2 kHz | |||
| Topographie Reproduzierbarkeit | <0.03 nm | |||
| Scangeschwindigkeit | 5 μm/s | |||
| Objektiv / Vergrößerung | Arbeitsabstand / mm | Numerische Blende | Messfeld / mm2 | Punktabstand / µm |
| 2.5x | 10.3 | 0.075 | 3.4 x 2.8 | 1.4 |
| 5x | 9.3 | 0.13 | 1.7 x 1.4 | 0.7 |
| 10x | 7.4 | 0.3 | 0.85 x 0.71 | 0.35 |
| 20x | 4.7 | 0.4 | 0.43 x 0.36 | 0.175 |
| 50x | 3.4 | 0.55 | 0.17 x 0.14 | 0.07 |
| 100x | 2 | 0.7 | 0.09 x 0.07 | 0.035 |
| 115x | 0.7 | 0.8 | 0.075 x 0.06 | 0.03 |
Systemleistung |
|
| 1-σ Reproduzierbarkeit 0,4 m Schritthöhe | <1 nm |
| 1-σ Reproduzierbarkeit 12 m Schritthöhe | <3 nm |
Maschinengröße |
|
| Sensorgewicht | ~2 kg (4.4 lbs) |
| Grober Positionierungsbereich (max.) (manuelle Z-Positionierung) |
70 mm |
| Grober Positionierungsbereich (max.) (manuelle Z-Positionierung) |
1.9 mm |
| Gekippter Winkel (Nivellierungsvorrichtung) | ±3° |
Scannen |
|
| Scanbereich | Bis zu 100 μm |
| Maximale Scan-Geschwindigkeit von | ~200 μm/s |
| Digitalisierung | Bis 0.01 pm |
Positionierungstabelle¹ |
|
| Positionierfläche | 100 x 100 mm² |
| Tragfähigkeit | 2 kg |
| Auflösung | 0.01 µm |
| Orthogonalität | <10 arcsec |
| Vibrationsisolationsoptionen | verfügbar |
¹ Andere Positionierungstischgrößen auf Anfrage erhältlich.
Resources
Benefits of Consolidating Metrology Operations
Automated metrology platforms not only ensure high quality finished goods, these high speed solutions also lower total cost per part by consolidating multiple metrology operations into one system.
Improving Long-Term Performance of Metrology Systems
In challenging manufacturing environments, adjustability, calibration, and monitoring are key influences on the long-term performance of automated metrology systems installed in uncontrolled environments.
Speed Wins in Contact vs. Non-Contact Surface Profiling
In surface morphology inspection, non-contact optical methodologies provide the same measurement results as a conventional contact profiler—but in a fraction of time.
Kontaktaufnahme
Mit Produktionsstätten in den USA und China bietet DWFritz globalen Support an.
