ZTS-5050

A high-speed, precision surface profiling inspection sensor for shop-floor installation.

Non-contact 3D Surface Profiling Sensor

With a scanning range of 100µm, the ZeroTouch® ZTS-5000 Series non-contact surface profiling sensor system is optimized for nano structures and functional micro structures.

Fast, Precise 3D Surface Measurements

The ZeroTouch® 5000 Series sensor evaluates several thousand surface profiles using advanced white-light interferometry technology to capture high-speed, precision data acquisition and real-time 3D surface roughness measurements. Using high-resolution cameras, the sensor provides highly significant results without the limits of tactile measuring systems.

Lateral period limit
9

Surface Measurements

High-resolution cameras measure both smooth and rough specimen surfaces without contact, characterizing mechanically processed surfaces such as mirrors, semiconductor wafers, micro-lenses, glass, metal, plastic, composite, or other surfaces.

9

Precision Height Mapping

The sensor works with interference objectives from 2.5x to 50x, yielding fast, precise representation of the height information and the relevant surface parameters using a piezo objective adjuster and broadband wavelength spectrum lighting.

9

ISO Conform Roughness Measurements

Objectives starting from 10x and higher can be used for ISO confirm roughness measurements in accordance with ISO 25178 and ISO 4287.

Aerospace

  • Bearings
  • Cylinders, pipes, and bores
  • Gears and sprockets
  • Shafts and seals
  • Inline measurements
  • Actuators

Automotive

  • Bearings
  • Brakes and clutches
  • Sensors
  • Engines
  • Gears and sprockets
  • Shafts and seals
Semiconductor Industry

Semiconductors

  • Wafer inspection and metrology
  • Electro polished surfaces
  • Die attach
  • ​Inkjet nozzle plate
  • High purity valves
Medical Devices Industry

Medical Devices

  • Dental implants
  • Medical blades and sharps
  • Stents
  • Orthopedics

Precision Manufacturing

  • Precision machined parts
  • Power cutting tools
  • Lenses

Features & Benefits

  • Non-contact measurements of smooth, rough, and specular surfaces such as glass, metal, plastic, and composites
  • Precise measurement of height and relevant surface parameters
  • Installed in the immediate vicinity of the production line
  • Inspects mirrors, semiconductor wafers, microlenses, and solar cells
  • Micron-level, fast measurements of various surface profiles
  • 3D sensor with manually interchangeable objective
  • White-light interferometry-based, high-resolution 5 MP sensor
  • Piezo positioning system with interferometric calibrated closed-loop controller (up to 100µm scan range)
  • Optional XY positioning table with manual Z adjustment
  • Advanced algorithms improve speed and reduce system noise

Oberflächenmessungen

Hochauflösende Kamera

5 MP (ZTS-5050)
Messpunkte 2,456 x 2,054
Scanning Speed, Full ResolutionScangeschwindigkeit, volle Auflösung 77 Hz
Scangeschwindigkeit ROI Bis zu 2 kHz
Topographie Reproduzierbarkeit <0.03 nm
Scangeschwindigkeit 5 μm/s
Objektiv / Vergrößerung Arbeitsabstand / mm Numerische Blende Messfeld / mm2 Punktabstand / µm
2.5x 10.3 0.075 3.4 x 2.8 1.4
5x 9.3 0.13 1.7 x 1.4 0.7
10x 7.4 0.3 0.85 x 0.71 0.35
20x 4.7 0.4 0.43 x 0.36 0.175
50x 3.4 0.55 0.17 x 0.14 0.07
100x 2 0.7 0.09 x 0.07 0.035
115x 0.7 0.8 0.075 x 0.06 0.03

Systemleistung

1-σ Reproduzierbarkeit 0,4 m Schritthöhe <1 nm
1-σ Reproduzierbarkeit 12 m Schritthöhe <3 nm

Maschinengröße

Sensorgewicht ~2 kg (4.4 lbs)
Grober Positionierungsbereich (max.)
(manuelle Z-Positionierung)
70 mm
Grober Positionierungsbereich (max.)
(manuelle Z-Positionierung)
1.9 mm
Gekippter Winkel (Nivellierungsvorrichtung) ±3°

Scannen

Scanbereich Bis zu 100 μm
Maximale Scan-Geschwindigkeit von ~200 μm/s
Digitalisierung Bis 0.01 pm

Positionierungstabelle¹

Positionierfläche 100 x 100 mm²
Tragfähigkeit 2 kg
Auflösung 0.01 µm
Orthogonalität <10 arcsec
Vibrationsisolationsoptionen verfügbar

¹ Andere Positionierungstischgrößen auf Anfrage erhältlich.

Resources

Benefits of Consolidating Metrology Operations

Automated metrology platforms not only ensure high quality finished goods, these high speed solutions also lower total cost per part by consolidating multiple metrology operations into one system.

Improving Long-Term Performance of Metrology Systems

In challenging manufacturing environments, adjustability, calibration, and monitoring are key influences on the long-term performance of automated metrology systems installed in uncontrolled environments.

Speed Wins in Contact vs. Non-Contact Surface Profiling

In surface morphology inspection, non-contact optical methodologies provide the same measurement results as a conventional contact profiler—but in a fraction of time.

Kontaktaufnahme

Mit Produktionsstätten in den USA und China bietet DWFritz globalen Support an.

Global support and service